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PICCOLO
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Plasma unit type PICCOLO
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Specifications:
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| Unit dimensions: |
Bench mounted, 600 mm x 1900 mm x 800 mm (WxHxD) |
| Plasma chamber: |
Material: stainless steel
Volume: 45
lt.
Dimensions: 350 mm x 300 mm x 430 mm (WxHxD)
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| Gas quantity regulation: |
1-(4) automatic gas flow controllers (MFC) |
| Working pressure: |
10 to 100 Pa |
| Frequency maintenance: |
Alternatively
Microwave-system: PE GIGATRON© electrode system, 0 to 600 Watt, 2.45 GHz
RF-system: 0 to 600 Watt, 13.56 MHz, with automatic RF matchwork
LF-system: 0 to 600 Watt, 40 to 300 kHz |
| Safety elements: |
Inductively coded door-safety-contact, emergency-stop, low-pressure
switch
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| Process control: |
PLC with display (2 x 20 spaces), foil key, all parameters
programmable |
| Connection values: |
Power: 400 V, (L1, L2, L3, N, P), 50 Hz
Compressed
air: 6 bar, water- and oil-free
Process gases: 2 to 2.5
bar
Power: max. 2.5 kW
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| Weight: |
Approx. 200 kg, without pumps
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| Security: |
Conform to the valid CE regulation norms
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Options:
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| Vacuum pump: |
Vacuum pumping unit, chemical resistant, PFPE-oil filled |
| Rotary drum: |
Usable volume 5 lt. |
| PC-control unit: |
IPC, visualisation software and program run under Windows® |
| Printer and modem: |
Printer and modem for maintenance at distance |
| Vacuum measurement: |
Equipment with Baratron |
 PDF
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GERMANY: PLASMA ELECTRONIC GmbH, Otto-Lilienthal-Str. 2, D - 79395 Neuenburg, Tel: +49 (0)7631 7017 - 0, Fax: +49 (0)7631 7017 – 20, > email
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