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CVD-DOMINO
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Plasma unit Type CVD-DOMINO
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Specifications:
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| Unit dimensions: |
Rack mounted, 1200 mm x 2000 mm x 950 mm (WxHxD)
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| Plasma chamber: |
Material: stainless steel
Volume: 80
lt.
Dimensions: 400 mm x 400 mm x 500 mm (WxHxD)
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| Gas quantity regulation: |
Automatic gas flow controllers (MFC) |
| Frequency maintenance: |
13.56 MHz, with automatic RF matchwork |
| Safety elements: |
Inductive coded door-safety-contact, emergency-stop, low-pressure
switch
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| Process control: |
IPC controller with colour display, Siemens S7-PLC,
control
software Pro Tool Pro and visualization run under Windows®
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| Connection values: |
Power: 400 V, (L1, L2, L3, N, P), 50 Hz
Compressed
air: 6 bar, water- and oil-free
Process gases: 2 to 2.5
bar
Water: 2 to 3 bar. 4 to 7 lt/min (during plasma
process)
Power: max. 7.5 kW
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| Weight: |
Approx. 340 kg, without pumps
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| Vacuum pump: |
Vacuum pumping unit
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| Security: |
Conform to the valid CE regulation norms
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Options:
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| Printer and modem: |
Printer and modem for maintenance at distance |
 PDF
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GERMANY: PLASMA ELECTRONIC GmbH, Otto-Lilienthal-Str. 2, D - 79395 Neuenburg, Tel: +49 (0)7631 7017 - 0, Fax: +49 (0)7631 7017 – 20, > email
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